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空间光调制器是自适应光学系统中用来实时校正波前畸变的关键器件,其发展水平能够反映整个自适应光学系统的水平。基于微电子机械系统(MEMS)技术的空间光调制器具有体积小、能耗低、驱动器单元密度高以及与集成电路工艺兼容性好等优点,而成为空间光调制器领域研究的热点。详细介绍了MEMS空间光调制器的研究现状和存在的主要问题,并分析了MEMS空间光调制器的未来发展趋势。
Spatial light modulators are the key components in adaptive optics to correct wavefront distortions in real time, and their level of development reflects the level of the entire adaptive optics system. Spatial light modulator based on microelectromechanical system (MEMS) technology has the advantages of small volume, low energy consumption, high density of driver unit and good compatibility with integrated circuit technology, and has become a hot spot in the field of spatial light modulator. The research status and main problems of MEMS spatial light modulator are introduced in detail, and the future development trend of MEMS spatial light modulator is analyzed.