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采用室温溅射沉积和空气热氧化方法低成本地制备出纳米结构热致变色节能薄膜。利用扫描电子显微镜、X射线衍射仪、激光拉曼光谱仪和红外光谱分析仪等对其特性进行测试分析,研究了热氧化退火与VO2薄膜的微结构和热致红外开关特性的内在关系,找出了直接影响薄膜的晶粒尺寸、晶格结构、组分、热滞回线和红外透射比等的主要因素及其控制方法,获得了最佳工艺参数并在玻璃上制备出高能效的纳米VO2热致变色节能薄膜。根据X射线衍射谱和拉曼光谱结果,利用相关公式计算得到VO2的平均晶粒大小约为45 nm。薄膜在2.5μm波长处相变前后红外透射比差量超过50%,相变温度为39℃,可见光透射比约达53%,显示了很好的热致变色性能。
The nanostructured thermochromic energy-saving thin film was prepared at room temperature by sputtering deposition and air thermal oxidation at low cost. The characteristics of thermal oxidation annealing were investigated by scanning electron microscopy, X-ray diffraction, laser Raman spectroscopy and infrared spectroscopy. The intrinsic relationship between thermal oxidation annealing and the microstructure and thermal-infrared switching characteristics of VO2 thin film was investigated. The main factors that directly affect the grain size, lattice structure, composition, thermal hysteresis loop and infrared transmittance of the films and their control methods have been studied. The optimum process parameters were obtained and the high energy efficient nano-VO2 Thermochromic energy-saving film. According to the results of X-ray diffraction and Raman spectroscopy, the average grain size of VO2 calculated by the correlation formula is about 45 nm. Before and after the phase change of the film at 2.5μm, the difference of the infrared transmittance is more than 50%, the phase transition temperature is 39 ℃ and the visible light transmittance is about 53%, which shows a good thermochromic property.