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5. Effects of annealing on structural, optical and electrical properties of Al-doped ZnO thin films

Effects of annealing on structural, optical and electrical properties of Al-doped ZnO thin films

来源 :中国科学：物理学、力学、天文学英文版 | 被引量 : 0次 | 上传用户：firemourne

【摘 要】

：

In this paper, the structural, electrical and optical properties of Al-doped zinc oxide (ZnO: Al) thin films onto quartz substrates prepared by electron beam ev

【作 者】

：

CHEN Yanwei YU Wenhua LIU Yich 

【机 构】

：

CentreforAdvancedOptoelectronicFunctionalMaterialResearch,KeyLaboratoryofExcitedStateProcesses,KeyLa

【出 处】

：

中国科学：物理学、力学、天文学英文版

【发表日期】

：

2004年5期

【关键词】

：

ZnO: Al thin film photoluminescence electrical properties STRUCTURAL properti 

【基金项目】

：

This work was supported by the National Natural Science Foundation of China (Grant Nos. 60176003 and 60376009).

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In this paper, the structural, electrical and optical properties of Al-doped zinc oxide (ZnO: Al) thin films onto quartz substrates prepared by electron beam evaporation technique were studied. All samples are polycrystal with a hexagonal structure and c-

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