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本文叙述了声光外差测微位移或测微振动的原理,及其光学实验系统和电路系统,同时给出压电镜频响特性的测试结果。
This paper describes the principles of acoustooptic heterodyne micrometric displacement or micrometric vibration, as well as its optical experimental system and circuit system. At the same time, the test results of the frequency response of the piezoelectric mirror are given.