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本文阐述真空传递冷压铟封工艺的特点,以及为研究此项工艺所使用的真空系统。接着给出了影响真空传递冷压钢封工艺质量的主要工艺参数。最后介绍了采用镀铟工艺的真空传递冷压铟封试验,试验证明,在柯伐或无氧铜基底上镀铟,可以把柯伐和柯伐(或无氧铜)成功的焊在一起,并得到有一定寿命的气密性器件。
This article describes the characteristics of the vacuum transfer cold indium seal process and the vacuum system used to study the process. Then, the main process parameters affecting the quality of cold-pressed steel seal in vacuum transfer are given. In the end, the vacuum transfer indium indium seal test with indium plating technology is introduced. The test proves that the welding of Kovar and Kovar (or oxygen-free copper) can be successfully welded together with indium plating on Kovar or oxygen- And get a certain life expectancy of air-tight devices.