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为了提高微机电系统中微执行器的作用距离,设计了一种全硅结构的微型柔性力-位移传动机构,用于放大微执行器的输出位移。建立了传动机构的简化力学模型和有限元模型,并对机构性能的影响因素进行了分析。用深层反应离子刻蚀工艺在硅隔离衬底上成功制备了电热微执行器-微型柔性传动机构样机,并进行测试。结果表明,柔性力-位移传动机构能够有效地放大微执行器的输出位移,实测放大倍数达到18.9,可以极大地扩展微机电系统微执行器的应用范围。
In order to improve the operating distance of micro-actuators in micro-electromechanical systems, an all-silicon micro-force-displacement transmission mechanism is designed to amplify the output displacement of the micro-actuators. The simplified mechanics model and finite element model of transmission mechanism are established, and the influencing factors of mechanism performance are analyzed. Electrothermal microactuator-miniature flexible transmission prototype was successfully fabricated on silicon isolation substrate by deep reactive ion etching process. The results show that the flexible force - displacement actuator can effectively magnify the output displacement of the micro - actuator with the measured magnification of 18.9, which can greatly expand the application range of the MEMS micro - actuator.