一、前言 箱式镀膜机是国际上七十年代初期出现的新型镀膜设备,它不仅在结构形式上有重大的突破,排除了升降式钟罩对膜厚控制仪的影响,而且使配用大抽速的真空系统成为可能,因而设备的真空性能也有了很大的提高。国外采用微处理机的镀膜设备均已商品化,它能自动完成复杂的光学 I. INTRODUCTION Box-type coating machine is a new type of coating equipment that appeared in the early 1970s in the world. It not only has a significant breakthrough in the structure, but also eliminates the influence of the bell-jar on the film thickness control device, Pumping speed of the vacuum system becomes possible, so the vacuum performance of the equipment has also been greatly improved. Microprocessing equipment abroad have been commercialized, it can automatically complete the complex optical