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通过磁控溅射法在掺氟二氧化锡导电玻璃(FTO)衬底上溅射金属铜薄膜,所制备的Cu薄膜在管式炉中退火氧化生长得到CuO纳米线阵列薄膜.用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、高分辨透射电子显微镜(HRTEM)对其形貌和结构进行了表征,并研究了这种通过磁控溅射得到的CuO纳米线阵列薄膜对CO和H2S的气敏性质.研究结果表明,CuO纳米线阵列薄膜在250℃时对CO气体具有最强的气敏响应,并且当CO浓度增大时其气敏响应明显增强.而对于H2S气体,在常温下CuO纳米线阵列薄膜能够对低浓度的H2S气体响应,说明这种CuO纳米线阵列薄膜可以在常温、低浓度下探测H2S气体;而当测试温度升高时,其电阻值在H2S气体氛围中迅速减小.我们对这种异常的电阻变化现象进行了解释.
A Cu film was sputtered on a fluorine-doped tin oxide conductive glass (FTO) substrate by a magnetron sputtering method, and the Cu film was annealed and oxidized to grow in a tube furnace to obtain a CuO nanowire array film. The X-ray diffraction The morphology and structure of the films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HRTEM). The effects of CuO nano- H2S.The results show that the CuO nanowire array film has the strongest gas-sensing response to CO gas at 250 ℃, and its gas-sensing response is obviously enhanced when the CO concentration is increased.For H2S gas, CuO nanowire arrays at room temperature can respond to low concentrations of H2S gas, indicating that this array of CuO nanowires can detect H2S gas at room temperature and low concentrations. When the test temperature rises, In the rapidly decreasing .We explain the phenomenon of this abnormal resistance changes.