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报道了一种新型结构的光纤法布里-珀罗(F-P)折射率传感器。使用腐蚀工艺在切割好的掺铒光纤端面制作一个封闭的微槽,然后与一段单模光纤熔接形成封闭的F-P腔。腐蚀产生的微槽底部是一个凹谷,靠近凹谷切割并研磨产生一个微通道,同时光束也能够返回并不损坏F-P干涉仪,利用毛细作用液体可进入F-P腔。根据F-P干涉原理,传感头反射光谱的波谷波长与腔内折射率成线性关系。实验表明当折射率在1.3333~1.3899内变化时,线性度为0.9996,灵敏度为1068 nm/RIU(refractive index unit)。该传感器为全光纤结构,具有体积小、结构稳定、精度高、耐腐蚀等特点,适用于液体和气体折射率的微型化测量。
Reported a new type of fiber Fabry-Perot (F-P) refractive index sensor. An etching process is used to make a closed microgroove on the cut end face of the erbium-doped fiber, and then a single-mode fiber is fused to form a closed F-P cavity. The bottom of the microchannels created by corrosion is a valley cut and ground near the valleys to create a microchannel. The beam is also returned without damaging the F-P interferometer, allowing capillary action of liquid into the F-P cavity. According to the F-P interference principle, the wavelength of the reflection spectrum of the sensor head has a linear relationship with the refractive index in the cavity. Experiments show that when the refractive index changes in 1.3333 ~ 1.3899, the linearity is 0.9996, the sensitivity is 1068 nm / RIU (refractive index unit). The sensor is all-fiber structure, with small size, stable structure, high precision, corrosion resistance and other characteristics, suitable for liquid and gas refractive index of the miniaturized measurement.