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设计了一种工作于VHF频段的新型微机电谐振器,采用了一种以阵列方式降低谐振器动态电阻的方法,通过ANSYS有限元分析软件对谐振器进行模态分析。结果表明,与减小换能电容间隙和增大偏置电压相比,采用的方法可以减小动态电阻,增大功率容量,谐振器阵列可以在保证谐振频率不变的情况下提高品质因数、减少损耗、降低动态电阻。设计的谐振器与谐振器阵列的工作频率为123 MHz。
A new type of MEMS resonator working in the VHF band is designed. A method of reducing the dynamic resistance of the resonator in an array mode is adopted. The modal analysis of the resonator is carried out by ANSYS finite element analysis software. The results show that the proposed method can reduce the dynamic resistance and increase the power capacity compared with reducing the gap of the capacitor and increasing the bias voltage. The resonator array can improve the quality factor while keeping the resonant frequency unchanged, Reduce the loss, reduce the dynamic resistance. The designed resonator and resonator array operate at 123 MHz.