论文部分内容阅读
应用 MSM结构光电探测器相对光谱响应的理论公式 ,得到金刚石膜 MSM紫外光电探测器相对光谱响应理论曲线 ,与实验曲线进行比较 ,发现两者吻合得很好。探测器光谱响应的截止波长都在 2 2 0～ 2 3 0 nm范围 ,紫外光与可见光的相对响应度相差一个数量级。根据 MSM结构光电探测器光谱响应曲线拟合出金刚石薄膜厚度、少子扩散长度等表征参数 ,探讨金刚石膜吸收层反射率、吸收系数、金刚石的晶粒大小及金属电极叉指指宽、指距等参数对金刚石膜 MSM光电探测器光谱响应和量子效率的影响。
The relative spectral response curve of diamond film MSM UV detector is obtained by using the theoretical formula of relative spectral response of MSM structured photodetector. Compared with the experimental curve, it is found that the two are in good agreement. The cut-off wavelength of the detector’s spectral response is in the range of 220-230 nm, and the relative responsivity of ultraviolet light and visible light is an order of magnitude different. According to the spectral response curve of MSM structured photodetector, the characterization parameters such as the diamond film thickness and the minority carrier diffusion length are fitted, and the reflectivity, absorption coefficient, diamond grain size, finger electrode finger width, Effect of Parameters on Spectral Response and Quantum Efficiency of Diamond Membrane.