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采用无机溶胶-凝胶法在二氧化硅基底上制备不同厚度的二氧化钒薄膜,通过X射线光电子能谱、X射线衍射和场发射扫描电子显微镜分析薄膜的化学组成和微观结构,并利用变温傅里叶变换红外光谱对薄膜在红外波段的相变性能进行检测。结果发现:薄膜均沿(110)晶面择优生长;随厚度增加,其结晶度提高,表面晶粒明显增大,大小分布越不均匀,并导致薄膜在红外波段的低温和高温透过率均降低,滞后温宽变窄,相变陡然性增强。
The vanadium dioxide films with different thicknesses were prepared on silica substrate by inorganic sol-gel method. The chemical composition and microstructure of the films were analyzed by X-ray photoelectron spectroscopy, X-ray diffraction and field emission scanning electron microscope. Fourier transform infrared spectroscopy of the film in the infrared band of the phase transition properties were detected. The results show that all the films grow preferentially along the (110) plane. With the increase of the thickness, the crystallinity of the films increases, the surface grains increase obviously and the size distributions become more uneven, which leads to the low and high temperature transmittance of the films in the infrared band Reduce, hysteresis temperature widening narrow, sharp increase in phase transition.