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叙述了一种经济实用的被检件在非真空收集器中的质谱检漏方法,通过试验验证了方法的正确性,并从理论上分析了漏率的标定方法、检漏灵敏度以及检测误差。
An economical and practical method of mass spectrometry leak detection in non-vacuum collectors is described. The correctness of the method is verified through experiments. The calibration method of leak rate, leak detection sensitivity and detection error are theoretically analyzed.