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第1期残余氛在等离子体增强化学气相沉积TIN膜中的偏聚过程研究············”··········……谢飞(1)活塞压缩机曲轴断裂原因分析·························································
Study on the segregation process of the residual phase in the plasma enhanced chemical vapor deposition TIN film " Analysis of crankshaft fracture of piston compressor ·············································································· ··················