介绍了一种基于偏振光干涉的直线度测量系统,该系统由固定部分和活动部分组成。测量时,活动部分固定在被测要素上。被测要素的直线度变化将导致两线偏振光相位的变化。通过计量干涉条纹即可得到直线度的变化结果。实验显示本测量系统具有10nm的分辨率,在20mm的测量范围内误差≤0.5μm,提高了分辨率和测量精度。 A linearity measurement system based on polarized light interference is introduced. The system consists of a fixed part and an active part. Measurement, the activities of the fixed part of the measured elements. Changes in the straightness of the measured element will result in a change in the phase of the two linearly polarized light. By measuring the interference fringes you can get the results of changes in straightness. Experiments show that the measurement system with a resolution of 10nm, within the measurement range of 20mm error ≤ 0.5μm, increased resolution and measurement accuracy.