论文部分内容阅读
为了实现大口径光学元件表面轮廓的高精度测量,提出了一种大承载气浮回转工作台的调心技术,并研制了一套具有偏心自动调整功能的测控系统。该系统主要由精密气浮回转轴、台达PLC、数显千分表和轮廓仪工作台组成。利用VC++的PLC串口通讯和偏心调整软件的控制,实现了轮廓仪的自动调心功能。
In order to achieve high-precision measurement of the surface profile of large-aperture optical elements, a self-aligning technology of large bearing air-floating rotary table is proposed and a set of monitoring and control system with eccentric automatic adjustment function is developed. The system consists of precision air flotation rotary axis, Delta PLC, digital micrometer and profiler table. The use of VC ++ PLC serial communication and eccentricity adjustment software control, the profiler of the automatic alignment function.