【摘 要】
：
为得到摩擦性能良好的导电涂层,用磁控溅射法制备了3种碳/铜复合涂层,利用载流摩擦磨损试验机分别测试了导电润滑脂润滑下不同电压时各涂层的载流摩擦学性能,通过扫描电镜(SEM)和X射线光电子能谱仪(XPS)观察并分析了磨痕表面形貌及主要元素化学状态.结果 表明:磁控溅射碳/铜复合涂层具有优良的减摩抗磨能力和较好的导电性能,制备的涂层2中(制备工艺参数为C靶功率1000 W、Cu靶功率200 W)碳和铜的比例最合适;在载流摩擦过程中,磁控溅射碳/铜复合涂层中形成了石墨化碳膜和以氧化物为主的摩擦化学保护膜.
【机 构】
：
华北电力大学能源动力与机械工程学院,北京102206
论文部分内容阅读
为得到摩擦性能良好的导电涂层,用磁控溅射法制备了3种碳/铜复合涂层,利用载流摩擦磨损试验机分别测试了导电润滑脂润滑下不同电压时各涂层的载流摩擦学性能,通过扫描电镜(SEM)和X射线光电子能谱仪(XPS)观察并分析了磨痕表面形貌及主要元素化学状态.结果 表明:磁控溅射碳/铜复合涂层具有优良的减摩抗磨能力和较好的导电性能,制备的涂层2中(制备工艺参数为C靶功率1000 W、Cu靶功率200 W)碳和铜的比例最合适;在载流摩擦过程中,磁控溅射碳/铜复合涂层中形成了石墨化碳膜和以氧化物为主的摩擦化学保护膜.
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