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本文介绍了新型的TITAN离子注入系统的结构、特点及工作原理。TITAN源设计思想新颖,是DENNING源与MEVVA源的有机结合,它能给出气体离子,也能给出金属和气体的混合离子,在金属材料改性方面具有潜在的应用前景。笔者对该系统的技术特性及优缺点进行了评述。
This article describes the structure, characteristics and operating principle of the new TITAN ion implantation system. TITAN source innovative design idea is the organic combination of DENNING source and MEVVA source, it can give gas ions, but also give mixed ions of metals and gases, has potential applications in the modification of metal materials. The author of the system’s technical characteristics and advantages and disadvantages were reviewed.