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天光一号高功率KrF准分子激光装置由研制阶段过渡到使用阶段,需要将11套实验性气系统做成1套应用性气系统,进一步保障加速器的安全、可靠、稳定运行。该系统将实现气系统的完全自动化运行,并提供手动系统作为备用运行手段。完成后的装置具有以下优点。
The first high-power KrF excimer laser device from the development stage to the transitional stage requires the development of 11 experimental gas systems as an applied gas system to further ensure the safe, reliable and stable operation of the accelerator. The system will achieve full automation of the gas system and provide a manual system as a backup operation. The finished device has the following advantages.