近年来,利用半导体技术,制造集成化的微米尺寸的微型真空管(亦称为真空IC)的愿望越来越强烈,与此趋势相呼应,1988年6月,在美国召开了第一届真空微电子学国际会议。本文即是以此次会议报告的内容为中心,介绍了真空微电子学的发展动向。 In recent years, the desire to manufacture integrated micron-sized miniature vacuum tubes (also referred to as vacuum ICs) using semiconductor technology has become stronger and stronger, echoing this trend. In June 1988, the first vacuum micro Electronics International Conference. This article is based on the contents of the report of the meeting as the center, introduced the development trend of vacuum microelectronics.