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在需要双色信息的应用中,集成双色探测器列阵呈现出重要的系统优点(超过每种颜色分开的列阵)。利用具有同位波段灵敏度的单个列阵,可以保证两张不同波段图象之间的象元完美地配准。这种双色红外探测器可以用HgCdTe来制造,其方法是把一对背对背二极管插入一个三层异质结(TLHJ)。使用HgCdTe可以把短波红外和长波红外波段任意地合并起来。通过让两个二极管的共有层漂浮或者同其接触,三层异质结可以按序贯方式操作或者按同时方式操作。本文对序贯操作和同时操作意义上的波段选择效果进行了讨论。在圣巴巴拉研究中心,利用全液相外延HgCdTe技术,代表三层异质结每个波段目前最先进工艺线水平的性能得到了演示。业已证明:中波红外的平均RrA为2×10~(7)Ω·cm~(2),长波红外的平均RrA为1.6×10~(3)Ω·cm~(2)。量子效率为典型的工艺线光伏HgCdTe水平。利用装配成序贯模式并含有上述三层异质结的64×64元传感器芯片,甚高质量的成象技术得到了论证。以同时方式操作的探测器已被制成小列阵和具有各种尺寸单元的结构。128×128的同时模式的列阵正在研究。每个波段的成象和测试结果(性能和均匀度)都同目前的单色HgCdTe列阵的技术水平相似。
In applications that require two-color information, the integrated two-color detector array presents significant system advantages (more than one for each color). Using a single array with in-band sensitivity allows perfect pixel registration between two images in different bands. The two-color infrared detector can be made of HgCdTe by inserting a pair of back-to-back diodes into a triple-layer heterojunction (TLHJ). With HgCdTe you can combine shortwave infrared and longwave infrared bands arbitrarily. By floating or contacting a common layer of two diodes, the three-level heterojunction can be operated in a sequential manner or in a simultaneous manner. This article discusses the effect of sequential operation and band selection in the sense of simultaneous operation. At the Santa Barbara Research Center, using all-liquid-phase epitaxial HgCdTe technology, the performance of the state-of-the-art process lines representing the three-level heterojunction at each band is demonstrated. It has been proved that the average RrA of medium wave infrared is 2 × 10 ~ (7) Ω · cm ~ (2) and the average RrA of long wave infrared is 1.6 × 10 ~ (3) Ω · cm ~ (2). The quantum efficiency is the typical HgCdTe level for process lines. A high-quality imaging technique is demonstrated using a 64 × 64 sensor chip assembled in sequential mode and containing the above three-level heterojunction. Detectors that operate in a simultaneous manner have been fabricated into small arrays and structures with various size units. An array of 128 × 128 simultaneous modes is under investigation. The imaging and test results (performance and uniformity) for each band are similar to those of current monochromatic HgCdTe arrays.