采用MEVVA离子注入机引出的Ag ,Cu ,Ti和Si离子注入聚酯薄膜 ,注入后的聚酯膜电阻率大大降低了 .用透射电子显微镜观察注入聚酯膜的横截面 ,TEM照片表明 ,在注入层中形成了纳米金属颗粒和富集的碳颗粒 .用X射线衍射测量了注入层中结构的变化和新相的形成 ,进而讨论了金属离子注入聚酯膜的导电机理 The MEVVA ion implanter was used to implant the ions of Ag, Cu, Ti and Si into the polyester film, and the electrical resistivity of the polyester film after injection was significantly reduced. The cross section of the polyester film was observed with a transmission electron microscope. The nanocrystalline metal particles and the enriched carbon particles were formed in the implanted layer.The structure of the implanted layer and the formation of new phase were measured by X-ray diffraction, and then the conductivity mechanism of metal ion implanted polyester film was discussed