研究了抛光对化学气相沉积金刚石自支撑膜断裂强度的影响。结果表明,金刚石自支撑膜粗糙表面所带来的V形缺口会降低其断裂强度,而且随着膜厚的增加,降低的程度越明显,通过抛光粗糙表面,消除了V形缺口对断裂强度的影响,有利于提高金刚石膜的抗破坏能力。提出了一种金刚石膜断裂强度的经验计算方法,获得的断裂强度值更接近于金刚石膜的本征断裂强度。 The effect of polishing on the rupture strength of CVD free standing diamond films was investigated. The results show that the V-shaped notch caused by the rough surface of diamond self-supporting film will reduce the fracture strength, and the more obvious the decrease with the increase of the film thickness. By polishing the rough surface, the V- Impact, help to improve the anti-damaging ability of diamond film. An empirical calculation method for the rupture strength of diamond films was proposed. The rupture strength value obtained was closer to the intrinsic rupture strength of diamond films.