光瞳滤波器作为实现超分辨的基本元件之一,它的设计以及制作都非常重要。设计了一种正弦变化的振幅型光瞳滤波器,可以通过调节少量的参量实现各种不同的超分辨模式。选择正弦函数的周期以及光瞳中心点透过率变化两个参量来实现对最终超分辨效果的调节。数值计算结果表明:在整个入射光瞳上的透过率瞳函数分布具有0.5~2个正弦振幅周期时,较为合适。小于0.5个周期将不会有任何超分辨效果,大于2个周期超分辨效果反而变差。数值计算中还注意到,当周期数为整数时,斯特雷尔比将保持0.25不变。对正弦变化振幅型光瞳滤波器的计算结果,显示了其特殊的性质,对实际中制作正弦变化振幅型光瞳滤波器有一定的指导作用。 Pupil filter as one of the basic components to achieve super-resolution, it’s design and production are very important. A sinusoidal varying amplitude-type pupil filter is designed to achieve a variety of different super-resolution modes by adjusting a small number of parameters. Select the period of the sine function and the change of the pupil center point two parameters to achieve the final super-resolution adjustment. The numerical results show that it is more suitable when the transmission pupil function distribution over the entire entrance pupil has 0.5 ~ 2 sine amplitude periods. Less than 0.5 cycles will not have any super-resolution effect, more than 2 cycles super-resolution effect worsened. It is also noticed in the numerical calculation that when the number of cycles is an integer, the Stalier ratio will remain unchanged at 0.25. The results of the sinusoidal amplitude-varying pupil filter show its special properties, which will guide the practice of making a sinusoidal amplitude-varying pupil filter.