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用等离子体浸没离子注入与沉积(PIIID)复合改性技术在AISI52100轴承钢基体表面合成了高硬耐磨的TiN薄膜。膜层的相组成及其表面形貌分别用X射线衍射(XRD)和原子力显微镜(AFM)表征。合成薄膜前后试样的力学性能经纳米压痕和划痕实验评价。XRD结果表明,膜层中主要存在TiN相,择优取向(200),同时含有少量TiO2和钛氮氧的化合物。AFM形貌显示出试样表面TiN呈定向排列,膜层均匀完整,结构致密。纳米压痕测试结果表明,膜层具有较高的纳米硬度和弹性模量,最大值分别达到22.5和330 GPa,较基体分别增长104.5%和50%。根据纳米划痕形貌和划痕深度随划痕位置的变化关系分析出,薄膜在纳米划擦过程中先后经历了弹性变形,弹塑性变形,加载开裂或卸载剥落三个阶段。划擦剥落抗力达到80mN,表明TiN薄膜具有很好的弹性恢复能力和较强的疲劳剥落抗力。
High hardness and wear resistant TiN films were synthesized on AISI52100 bearing steel substrate by plasma immersion ion implantation and deposition (PIIID) composite modification technology. The phase composition and surface morphology of the films were characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. The mechanical properties of the samples before and after the composite film were evaluated by nanoindentation and scratch test. The results of XRD showed that the TiN phase mainly existed in the film with the preferred orientation (200) and a small amount of TiO2 and titanium oxynitride. AFM morphology showed that the sample surface TiN was oriented, the film is uniform and complete, compact structure. The nanoindentation test results show that the film has high nanohardness and elastic modulus, the maximum reached 22.5 and 330 GPa, respectively, compared with the matrix increased by 104.5% and 50%. According to the relationship between the morphology of scratches and the scratch depth, the films undergo three stages of elastic deformation, elasto-plastic deformation, cracking after loading or unloading peeling. Scratch scratch resistance reached 80mN, indicating that the TiN film has good elastic recovery and strong resistance to fatigue spalling.