【摘 要】
：
在微机电系统(MEMS)中,影响多晶体微梁构件疲劳损伤的因素很多,如载荷方式、晶粒尺寸及其内部空间滑移系等。重点是从多晶铜微梁构件的微观结构入手,分析引起微构件疲劳损伤
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在微机电系统(MEMS)中,影响多晶体微梁构件疲劳损伤的因素很多,如载荷方式、晶粒尺寸及其内部空间滑移系等。重点是从多晶铜微梁构件的微观结构入手,分析引起微构件疲劳损伤的内在应力机制。首先由两个取向分别为[110]和[100]的多晶铜晶粒构造一定厚度微梁模型,运用细观力学方法分析微梁在外载作用下,其内部晶粒的多个晶胞中主要晶体学滑移方向上的应力应变状态及其定量表达;在此基础上,确定多晶铜微梁构件内部晶粒晶体学取向角度对其晶胞内滑移系驱动分切应力的影响规律,并初步分析了多晶材料微梁内部晶粒的几何排布对微梁构件损伤力学行为的影响。
In MEMS, the factors affecting the fatigue damage of polycrystalline micro-beam components are many, such as the load mode, the grain size and its internal space slip system. The key point is to start with the microstructure of the polycrystalline copper micro-beam and to analyze the intrinsic stress mechanism that causes the micro-structural fatigue damage. Firstly, a certain thickness of micro-beam model was constructed from two polycrystalline copper grains with [110] and [100] orientations respectively. The micro-beam model was analyzed by micromechanics to analyze the effect of micro- The stress-strain state of the main crystallographic slip direction and its quantitative expression; on this basis, the influence law of the crystallographic orientation angle of the crystal in the polycrystalline copper micro-beam member on the driving shear force of the intracrystalline slip system was determined , And the influence of the geometric arrangement of the grains inside the polycrystalline microbeam on the damage mechanics behavior of the microbeam was analyzed preliminarily.
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