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以0.5mol/L草酸为电解液,在40V直流电压、0～5℃下采用二步氧化法制备通孔阳极氧化铝膜片,用射频磁控溅射在膜片上下表面沉积金电极,成功地制备了一种通孔结构湿敏传感器.湿度-阻抗特性测试显示,该传感器不但可在12%～97%的相对湿度范围内具有良好的阻抗-湿度线性变化关系,而且具有响应恢复速度快、重复稳定性好的特征.
A 0.5 mol / L oxalic acid solution was used as the electrolyte to prepare a via anodic alumina membrane by two-step oxidation at 40 V DC and 0-5 ℃. Gold electrodes were deposited on the upper and lower surfaces of the membrane by RF magnetron sputtering. A humidity sensor with through-hole structure was prepared.Humidity-impedance characteristic test showed that the sensor not only had a good linear relationship between the impedance and humidity in the relative humidity range of 12% -97%, but also had the advantages of fast response recovery , Repeat the characteristics of good stability.