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本文采用热丝 Ｃ Ｖ Ｄ 法在以 Ｃｕ／ Ｒｅ 镀膜为过渡层的铁衬底上沉积金刚石薄膜，研究了以 Ｒｅ 作为铁衬底上沉积金刚石膜的过渡层的制备工艺及其对沉积金刚石膜的影响。实验结果表明：在铁衬底上难以直接镀上铼膜，但在铜上镀铼比铁衬底上镀铼要容易得多，且镀铼层质量好。以 Ｃｕ／ Ｒｅ复合膜为过渡层，以巴基管为成核剂可以在铁衬底上沉积出质量很好的金刚石膜。
In this paper, hot wire C V D method is used to deposit diamond film on the iron substrate with Cu / Re coating as the transition layer, the preparation process of Re as the transition layer of diamond film deposited on iron substrate, Impact. The experimental results show that it is difficult to directly coat the rhenium film on the iron substrate, but rhenium plating on the copper is much easier than rhenium on the iron substrate, and the rhenium plating layer is of good quality. With Cu / Re composite film as the transition layer, Baji tube as nucleating agent can deposit a good quality diamond film on the iron substrate.