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目前,测量力和压力的石英压电传感器,大多基于石英纵向压电效应结构。纵向压电元件的灵敏度为:Q_x/F_x=d_(11) (1)式中,F_x——沿 X 轴施加的力;Q_x——同时产生的电荷。该灵敏度不可能大于压电模量d_(11)=2.31×10~(-12)(库仑/牛顿)。测量小力时,采用横向压电元件传感器。薄片形的横向压电元件如图1所示。这种压电元件的灵敏度为:
At present, quartz piezoelectric sensors that measure force and pressure are mostly based on the quartz longitudinal piezoelectric effect structure. The sensitivity of a longitudinal piezoelectric element is: Q_x / F_x = d_ (11) where F_x is the force applied along the X axis and Q_x is the charge generated at the same time. This sensitivity can not be larger than the piezoelectric modulus d 11 = 2.31 × 10 -12 (Coulomb / Newton). When measuring small force, the use of lateral piezoelectric sensor. The flaky transverse piezoelectric element is shown in FIG. 1. The sensitivity of this piezoelectric element is: