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光学系统和元件公差往往很严,检验这些产品是制造中一个基本部分。本评论描述光学的干涉性质怎样应用到光学检验,并指出各种技术应用的主要范围。
Tolerances on optical systems and components are often tight and testing these products is an essential part of manufacturing. This review describes how optical interference properties can be applied to optical inspection and points out the main areas in which various techniques are applied.