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开发了一种激光镜镜面粗糙度的全场、非接触干涉测量方法。测量了两面不同粗糙度的铜镜，测出的数据和用６ＪＡ型显微干涉轮廓仪测量的结果相吻合。测量的范围为０．０１～０．１２μｍ，理论上测量的精度可达０．００２μｍ。它对镜面抛光过程的控制有实际意义
A full-field, non-contact interferometric measurement method of laser mirror surface roughness has been developed. The copper mirrors with different roughness on both sides were measured. The measured data were in good agreement with the results measured by 6JA micro-interference profilometer. Measurement range of 0.01 ~ 0.12μm, theoretically measured accuracy of up to 0.002μm. It has practical significance for the control of the mirror polishing process