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本文介绍了稀有金属行业ITO靶材高温真空热压炉的设备组成、主要技术参数和结构特点,并指出了该设备在稀有金属行业ITO靶材制造行业推广应用的前景。
This paper introduces the equipment composition, main technical parameters and structural features of high temperature vacuum hot-pressing furnace for ITO target in rare metals industry. It also points out the prospect of this equipment in the promotion and application of ITO target manufacturing industry in rare metals industry.