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TiBCN单相陶瓷粉末是一种刚问世的新型材料,该材料具有Na Cl型面心立方(Fcc)结构,兼有陶瓷和金属特性。在真空状态下,当温度为1200℃时,利用热蒸发TiBCN粉末,在三氧化二铝(Al_2O_3)陶瓷衬底上获得了TiBCN薄膜。采用X射线衍射仪、场发射扫描电子显微镜及能谱分析仪研究了TiBCN薄膜的组织和微观结构,并用硬度计测试了薄膜的硬度。结果显示,利用热蒸发获得了TiBCN薄膜具有面心立方晶格结构,同时含有少量六方氮化硼(h-BN)相。所制备TiBCN薄膜结晶均匀,晶粒大小约为400 nm,硬度为20.55 GPa。
TiBCN single-phase ceramic powder is a new, emerging material with a Na Cl face-centered cubic (Fcc) structure that combines both ceramic and metal properties. Under vacuum condition, the TiBCN thin film was obtained by thermal evaporation of TiBCN powder on alumina (Al 2 O 3) ceramic substrate at a temperature of 1200 ℃. The microstructure and microstructure of TiBCN films were investigated by X-ray diffraction, field emission scanning electron microscopy and energy spectrum analyzer. The hardness of TiBCN films was tested by hardness tester. The results show that the TiBCN thin film has a face-centered cubic lattice structure and contains a small amount of hexagonal boron nitride (h-BN) phase by thermal evaporation. The prepared TiBCN film has a uniform crystal with a grain size of about 400 nm and a hardness of 20.55 GPa.