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在射频等离子体增强化学气相沉积(RF-PECVD)系统的腔室内,对聚对苯二甲酸乙二醇酯(PET)塑料薄膜进行Ar等离子体预处理,并采用光发射谱(OES)对不同处理参数下的氩气辉光状态进行在线监测。对处理前后PET及PET/ITO进行透过谱、原子力显微镜(AFM)以及扫描电镜(SEM)的测试结果表明,Ar等离子体处理改善了PET塑料薄膜的表面形貌,使之更适合ITO薄膜的生长。以Ar等离子体处理的PET/ITO为衬底,在沉积温度为125℃条件下,制备出效率为5.4%的p-i-n型非晶硅(a-Si)柔性太阳电池。
Polyethylene terephthalate (PET) plastic films were subjected to Ar plasma pretreatment in a chamber of a radio-frequency plasma enhanced chemical vapor deposition (RF-PECVD) system and the optical emission spectrum (OES) Argon glow status under process parameters was monitored online. The results of transmission spectra, atomic force microscopy (AFM) and scanning electron microscopy (SEM) of PET and PET / ITO before and after treatment show that Ar plasma treatment improves the surface morphology of PET plastic film and makes it more suitable for ITO film Grow. The p-i-n amorphous silicon (a-Si) flexible solar cell with an efficiency of 5.4% was prepared by Ar plasma-treated PET / ITO substrate at a deposition temperature of 125 ℃.