论文部分内容阅读
利用珀尔帖效应,采用三夹层技术测量了类金刚石碳(DLC)膜的热传导率,并指出在高离子轰击能量和低CH_4气压下。通过rf等离子体沉积所制得的DLC膜具有好的热稳定性,其热传导率为2.1—2.4W/cm.deg。
Using the Peltier effect, the thermal conductivity of diamond-like carbon (DLC) films was measured by the triple-sandwich technique and was demonstrated at high ion bombardment energies and low CH 4 pressure. The DLC film prepared by rf plasma deposition has good thermal stability with a thermal conductivity of 2.1-2.4 W / cm.deg.