一、概述目前,在生产中常用的化学热处理工艺,如渗碳、渗氮、渗铝、渗铬等,都是采用在金属材料表面渗入一些化学元素,改变表层组织结构从而达到所需要性能的目的。但是,这些工艺都是在高温下利用元素在活性原子状态渗入金属表面的。目前世界各国都在研究利用元素在离子状态渗入金属材料表面,例如在工具、模具表面利用离子镀渗方法渗入一层超硬物质(如TiN、TiC、ZrC、VC、NbC……等)可提高使用寿命几倍到几 I. Overview At present, chemical heat treatment processes commonly used in production, such as carburizing, nitriding, aluminizing, chromizing and so on, are all based on the infiltration of some chemical elements on the surface of metal materials to change the structure of the surface layer to achieve the desired performance purpose. However, these processes all utilize elemental infiltration of metal surfaces in the active atomic state at high temperatures. At present, all countries in the world are studying the use of elements infiltrated into the surface of metal materials in the ionic state. For example, the infiltration of a layer of super-hard material (such as TiN, TiC, ZrC, VC, NbC, etc.) Several times the service life