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对半导体光电探测器光谱灵敏度的测试原理进行分析研究,就研制的1套波长范围为04~11μm的采用双光路替代法,可以测试半导体光电探测器的光谱灵敏度和量子效率的光谱灵敏度测试装置进行了分析,该装置在测试过程中可以减小光源不稳定性对测试结果的影响,可以测试相对光谱灵敏度、绝对光谱灵敏度,还分析了影响该装置测试精度的一些因素,并给出了测试结果
The principle of spectral sensitivity of semiconductor photodetectors is analyzed and studied. A set of 1-wavelength alternative method with wavelength range of 04 ~ 11 μm can be used to test the spectral sensitivity and quantum efficiency of semiconductor photodetectors Sensitivity test device was analyzed. The device can reduce the influence of instability of light source on the test results, test the relative spectral sensitivity and absolute spectral sensitivity, and also analyze some factors that affect the test accuracy of the device. Out of the test results