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一、前言 气体敏感元件是一种将气体的成分、浓度等非电学量转变成电学量的元件。可以用半导体、金属、磁性材料等制备。目前普遍使用的是半导体材料SnO_2和ZnO。SnO_2的熔点较低,制备工艺简单,所以已进行了大量的研究;而对ZnO的研究则较少,原因是ZnO的熔点很高,需用复杂的溅射方法制备。用ZnO制备的气敏元件不仅老化特性比
First, the foreword The gas-sensitive element is a kind of gas composition, concentration and other non-electrical amount into electrical components. It can be made of semiconductor, metal, magnetic material and the like. Currently widely used are semiconductor materials SnO 2 and ZnO. Since SnO 2 has a low melting point and a simple preparation process, a large amount of research has been conducted, while ZnO is less studied because ZnO has a high melting point and requires complex sputtering methods. Gas sensors made of ZnO not only have an aging property ratio