Femtosecond Bessel-beam-assisted high-aspect-ratio microgroove fabrication in fused silica

来源 :Chinese Optics Letters | 被引量 : 0次 | 上传用户:dkmlyn
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
A simple and repeatable method to fabricate high-aspect-ratio(HAR) and high-quality microgrooves in silica is reported. The method consists of two steps:(1) formation of laser-modified regions by femtosecond Bessel beam irradiation, and(2) removing laser-modified regions through HF etching. Uniform, straight microgrooves can be fabricated and the highest aspect ratio that can be reached is ~52. The phenomenon is attributed to the uniform energy distribution in the long propagation distance, which leads to the long and uniform laser-modified regions and subsequent HF acid etching of laser-modified regions with high selectivity. This method will have potential applications in fabrication of HAR microgrooves in transparent materials. The simplest and repeatable method to fabricate high-aspect-ratio (HAR) and high-quality microgrooves in silica is reported. The method consists of two steps: (1) formation of laser- modified regions by femtosecond Bessel beam irradiation, and ) Removing laser-modified regions through HF etching. Uniform, straight microgrooves can be fabricated and the highest aspect ratio that can be reached is ~ 52. The phenomenon is attributed to the uniform energy distribution in the long propagation distance, which leads to the long and uniform laser-modified regions and subsequent HF acid etching of laser-modified regions with high selectivity. This method will have potential applications in fabrication of HAR microgrooves in transparent materials.
其他文献
请下载后查看,本文暂不支持在线获取查看简介。 Please download to view, this article does not support online access to view profile.
为了评价土的各种非线性本构模型在分析基础与地基相互作用问题中的适用性,作者用有限元法编制了计算机程序,并用该程序分别对受竖向中心荷载作用的三个圆形刚性基础进行了计算
AIM:To study interactions between hepatitis B virus(HBV)and interferon-α in liver-derived cells.METHODS:mRNAs were separately isolated from an HBV-transfected
为了提高电路故障诊断的正确率,提出一种小波消噪和改进神经网络相融合的模拟电路故障诊断模型。首先采用小波分析电路状态信息进行消噪并提取电路特征,然后采用遗传算法优化
摘 要  职业指导是为求职者就业、就业稳定、职业发展和用人单位合理用人、提供咨询、指导及帮助的过程。精细化职业指导在为高职院校学生职业指导起着积极的、无可取代的重要作用,做好高职院校精细化职业指导有着十分重要的现实意义。本文就开展精细化职业指导的实践进行分析。  【关键词】精细化;职业指导;实践  要深入落实开展精细化职业指导工作需要围绕职业指导的要点,结合高职院校学生的特点,通过深入研究、探讨、
AIM:To study the effects of sense and antisense KAI1genes on the growth and invasion of human hepatocellularcarcinoma (HCC) cell line MHCC97-H.METHODS:KAI1 sen
聚氨酯防水涂料(2)赵守佳(北京市三原建筑粘合材料厂100071)第二讲聚氨酯防水涂料中的化学目前,国内生产的聚氨酯防水涂料大多为双组份化学反应固化型,基中甲组份是由聚醚(或/和聚酯)多元醇和
通过操控线性和非线性损耗,使激光器满足单频运转的物理条件,获得了稳定高功率单频激光输出。利用非线性损耗取代了现有的标准具锁定技术,实现无调制锁定的宽带连续可调谐激
AIM:To investigate the expression of 1-1BB molecule inhepatocellular carcinoma (HCC) and its adjacent tissues.METHODS:Reverse transcription-polymerase chain re
AIM:To determine the expression of estrogen receptor(ER)β in Chinese colorectal carcinoma (CRC) patients.METHODS:ERβ expression in CRC was investigated byimm