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前言薄膜可以改变光学元件表面的物理性质和化学性质。利用薄膜改变光学仪器中的光线方向、强度和光谱成分(即所谓干涉膜),或者用来提高化学性质很差的光学元件表面的化学性能和环境性能,例如抗酸、碱、盐溶液及抗潮湿、抗盐雾、抗霉菌等的腐蚀(即所谓三防保护膜)。所以光学薄膜已经被广泛地应用在光学工业上。近几年来由于新技术,如,量子电子学、彩色电视、全息照像等的发展,光学薄膜材料的研究也不断地深入,尤其是用真空
Introduction Films can change the physical and chemical properties of optical components’ surfaces. The use of thin films to change the directionality, intensity and spectral composition of light in optical instruments, so-called interference films, or to improve the chemical and environmental properties of poorly chemically charged optical element surfaces such as acid, alkali, salt solutions and anti- Moisture, salt spray, anti-mold and other corrosion (the so-called three anti-protective film). Therefore, optical films have been widely used in the optical industry. In recent years, due to the development of new technologies, such as quantum electronics, color television, holographic and so on, the research of optical thin film materials has been continuously deepened, especially with vacuum