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本文主要研究了在动态工作模式下,利用矩形微悬臂梁的频率响应近似理论模型和有限元分析模型仿真计算微悬臂梁弯曲共振频率;同时利用微悬臂梁共振频率的实验测试系统测得聚合物微悬臂梁在空气中的一阶共振频率。
In this paper, the main research in the dynamic mode of operation, the use of rectangular microcantilever frequency response approximation theory model and finite element analysis of the simulation model of microcantilever bending resonance frequency; at the same time using the microcantilever resonant frequency of the experimental test system measured polymer First-order resonance frequency of microcantilever in air.