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扫描电子显微镜(SEM)广泛用于研究开发和质量管理等领域。由于在半导体和高分子材料领域中,若将加速电压降到几千伏,就能清楚地观察试样表面,所以希望能开发以低加速电压高分辨率非破坏地观察试样的SEM。因此已将能以低加速电压高分辨率地观察直径150mm(6英寸)试料的S—4500型
Scanning electron microscopy (SEM) is widely used in research and development and quality management and other fields. Since the acceleration voltage is reduced to a few kilovolts in the field of semiconductors and polymer materials, it is possible to clearly observe the surface of the sample. Therefore, it is desired to develop a SEM in which a sample can be observed non-destructively with high resolution at low accelerating voltage. For this reason, S-4500 models capable of observing a sample having a diameter of 150 mm (6 inches) at high resolution with low acceleration voltage