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采用微波等离子增强化学气相沉积法在 (10 0 )镜面抛光的硅片衬底上实现了金刚石薄片[10 0 ]定向织构生长。并用扫描电子显微镜、拉曼散射和傅立叶红外光谱仪分析测试了不同工艺得到的金刚石薄片的表面形貌、组成结构和红外性能。结果表明 :负偏压辅助定向成核和氢的等离子刻蚀不仅促进了金刚石薄膜的定向织构生长 ,而且还能刻蚀成核期的非金刚石成分。从而提高了金刚石薄片的红外光透过特性。
The directional texture growth of [100] diamond thin films was achieved on a (100) mirror-polished silicon substrate by microwave plasma enhanced chemical vapor deposition. The surface morphology, compositional structure and infrared properties of the diamond sheets obtained by different processes were analyzed by scanning electron microscopy, Raman scattering and Fourier transform infrared spectroscopy. The results show that the negative bias assisted orientation nucleation and hydrogen plasma etching not only promote the directional texture growth of diamond films, but also etch the non-diamond components during nucleation. Thereby improving the infrared light transmission characteristics of the diamond sheet.