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介绍了一种装置尾气处理的新工艺,即用重力沉降室除去尾气中的固体颗粒物,再用活性炭吸附处理尾气中的HF气体。这种工艺会大大提高处理效率,有效延长真空泵机组的使用寿命,也会大大节省人力物力。
A new technology of tail gas treatment is introduced, that is, the gravity settling chamber is used to remove the solid particles in the tail gas and then the activated carbon is used to treat the HF gas in the tail gas. This process will greatly improve the processing efficiency, effectively extend the service life of the vacuum pump unit, will greatly save manpower and resources.