低温等离子体技术是一个集物理、生物、化学和环境科学于一体的交叉综合性技术, 它在处理废气方面具有能耗低、效率高和无二次污染等明显优点.简要介绍了氮氧化物 (NOx) 、H2S和挥发性有机化合物 (VOCs) 这3种污染气体的来源和危害, 及介质阻挡放电法、低温等离子体协同技术和电晕放电法处理废气的原理及其对NOx、H2S和VOCs去除效率的影响条件, 并展望了低温等离子体技术在废气处理领域的应用.“,”The non-thermal plasma technology is a comprehensive technology integrating physics, biology, chemistry and environmental science, which has the advantages of low energy consumption, high efficiency, no secondary pollution and so on in the treatment of waste gas.The source and harm of the three kinds of polluted gases were summarized:NOx (nitrogen oxide), H2S (hydrogen sulfide), VOCs (volatile organic compounds), and introduced the principle of treating waste gas by dielectric barrier discharge, non-thermal plasma synergistic technology and corona discharge.The influence condition of them on the removal of NOx, H2S and VOCs was studied, and the development direction of non-thermal plasma technology was discussed.