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In this paper,formulas of third geometrical deflection aberrations for an ideal uniform electrostaticfield are derived by solving the motion equations of an electron passing through this field.The results can beused not only to estimate the distortion,astigamatism and field curvature,and coma produced by a Gaussianor shaped electron beam,but also to set the original size of the deflector and determine the effect caused bythe misalignment between the electron beam and the deflector.Some mistakes in Sturrock’s paper(1955)arealso pointed out.
In this paper, formulas of third geometrical deflection aberrations for an ideal uniform electrostaticfield are derived by solving the motion equations of an electron passing through this field. The results can beused not only to estimate the distortion, astigamatism and field curvature, and coma produced by a Gaussianor shaped electron beam, but also to set the original size of the deflector and determine the effect caused by the misalignment between the electron beam and the deflector.Some mistakes in Sturrock’s paper (1955) arealso pointed out.