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在多层介质薄膜中,激光的入射方式是影响薄膜抗损伤能力的关键因素之一.提出了一种模拟锥角高斯光入射多层介质薄膜后电场和热场分布的方法.该方法能够分析薄膜中高斯光各个角谱分量叠加形成的电场分布,进而得到由于薄膜本征吸收产生的热量沉积以及薄膜内部的温度场分布.针对中心波长为4.3μm的中红外高反膜进行了分析,给出了高反膜系的温升峰值随激光入射角度和偏振态的变化.结果表明:对于s偏振光,斜入射时膜系的最高温升峰值高于垂直入射峰值,而p光的结果则相反.此种模拟方法克服了原有方法对激光入射角度的限制,较好地反映出斜入射情况下激光偏振态对薄膜损伤的影响.
In multi-layered dielectric films, the incident mode of laser is one of the key factors that affect the anti-damage ability of the films.A method of simulating the electric field and thermal field distribution of multi-layered dielectric thin films is proposed, The electric field distribution formed by superposition of the various angular spectral components of the Gaussian light in the film and then the heat deposition due to the intrinsic absorption of the film and the temperature field distribution inside the film are analyzed.The analysis of the middle- The results show that for s-polarized light, the maximum peak temperature rise of the film is higher than that of the vertical incidence when oblique incidence, while the result of p light On the contrary, the simulation method overcomes the limitation of the original method to the angle of incidence of the laser and better reflects the influence of the laser polarization state on the film damage under oblique incidence.