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采用磁控溅射方法在40Gr不锈钢基体上,沉积了TiN及TiWN单层薄膜、TiN/MoS2及Ti-WN/MoS2双层薄膜,对比分析了薄膜的成分、相结构、微观形貌及摩擦学性能。结果表明:根据W含量的不同,TiWN薄膜中,Ti0.67W0.33N膜层具有较高的硬度和弹性模量;TiWN/MoS2薄膜中,TiWN层主要含有TiN和WN相,MoS2层含有MoS2和MoO3相;与TiN/MoS2薄膜比较,TiWN/MoS2薄膜具有更优异的减摩、耐磨性能,可减小材料的磨损,延长其使用寿命。
The films of TiN and TiWN, TiN / MoS2 and Ti-WN / MoS2 were deposited on 40Gr stainless steel substrate by magnetron sputtering method. The composition, phase structure, microstructure and tribology of the films were compared and analyzed. performance. The results show that TiW film has high hardness and elastic modulus in TiWN film according to the content of W; in TiWN / MoS2 film, the TiWN film mainly contains TiN and WN phase, MoS2 layer contains MoS2 and MoO3 phase; Compared with TiN / MoS2 film, TiWN / MoS2 film has more excellent anti-friction and anti-wear properties, which can reduce the material wear and prolong the service life.