Ga2O3材料的掺杂研究进展

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相比于第三代半导体材料碳化硅(SiC)和氮化镓(GaN),氧化镓(Ga2O3)具有禁带宽度更大、击穿电场更强、吸收截止边更短、生长成本更低等优点。掺杂是一种高效优化材料物性特征的方法,可以拓宽Ga2O3在不同领域的应用范围。本文对近年来Ga2O3材料的稀土掺杂以及其他元素的掺杂进行了综述,着重分析了稀土掺杂Ga2O3的发光特性。最后,对Ga2O3的稀土离子掺杂和p型掺杂方向进行了展望。
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