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日本三洋电机公司研制了成批生产集成型非晶硅太阳电池的新技术。除用于台式电子计机和钟表等小型物件以外,还着眼于开拓电动汽车、太阳电池瓦片等需要得到大功率的各种用途。非晶硅太阳电池乃是在玻璃基片上蒸镀氧化铟锡一氧化锡透明电极后,再用等离子化学气相沉积法镀上非晶硅层,并在表面涂上银电极。基片经钆铝石榴石激光扫描后使非晶硅层分割沉积,以获得必要的电压。化学气相沉积装置每次可以处理10厘米~2 的太阳电池30片。制造高效率非晶硅电池的关键是电极的制作方法和非晶态硅层的沉积。该公司采取的措
Japan’s Sanyo Electric Company developed a batch production of integrated amorphous silicon solar cells new technology. In addition to desktop computers and watches and other small objects, but also focus on the development of electric vehicles, solar panels and other needs of the need for high-power use. Amorphous silicon solar cells are deposited on a glass substrate indium tin oxide tin oxide transparent electrode, and then by plasma CVD amorphous coating of amorphous silicon layer, and the surface coated with silver electrode. After the substrate was laser scanned by gadolinium-aluminum garnet, the amorphous silicon layer was divided and deposited to obtain the necessary voltage. The chemical vapor deposition apparatus can process 30 pieces of solar cells 10 cm ~ 2 each time. The key to manufacturing high efficiency amorphous silicon cells is the fabrication of electrodes and the deposition of amorphous silicon layers. The company took measures